Shielding, particulate reducing high vacuum components

Details Shielding, particulate reducing high vacuum components Shielding, particulate reducing high vacuum components

2011-04-05

2011-04-05

Austin, Aaron (Department: 1784)

Stock material or miscellaneous articles

All metal or with adjacent metals

Composite; i.e., plural, adjacent, spatially distinct metal...

C428S678000, C428S679000, C428S680000, C428S681000

Reexamination Certificate

active

07919193

ABSTRACT:
A component for use in a high vacuum environment, the component including a core of non-magnetic Hastelloy with a cladding of nickel-iron covering the core at least in part. The component can be, for example, at least one of a gate valve for use in a high vacuum environment of an electron gun, a bearing, a slide way, a gate valve bearing, a rotary slide, a linear slide, an electron beam column, and electron beam chamber, and a vacuum chamber. In this manner, because the final mechanical tolerance is controlled by machining instead of part assembling, extremely high alignment accuracy is obtained. The final part provides field shielding as provided by the nickel alloy shell, low stray field provided by the non-magnetic Hastelloy, good vacuum performance, and tight mechanical tolerance control. Also, because Hastelloy has the advantage of a low oxidation rate in comparison to stainless steel and titanium, there is less contamination buildup due to conditions such as electron beam bombardment.

REFERENCES:
patent: 5874178 (1999-02-01), Takayasu
patent: 6860948 (2005-03-01), Pike, Jr.

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