Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Controlling current distribution within bath
Patent
1997-05-16
2000-10-17
Gorgos, Kathryn
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Controlling current distribution within bath
2042302, 2042303, 204297R, 204DIG7, 205125, 205136, C25D 500, C25D 1700
Patent
active
06132583&
ABSTRACT:
An electroplating system includes a tank that holds an electrolytic bath solution. An anode within the tank receives a first voltage having a first potential. A substrate cathode, immersible in the solution within the tank, spaced from the anode, receives a second voltage having a second potential, opposite to that of the first potential. A shield is immersible in the solution within the tank between the anode and cathode. The level of shielding provided by the shield is variable and controllable. In one embodiment, the shield includes a conductive element that receives a third voltage having the first potential, the magnitude of the third voltage being controllable. In another embodiment, the shield includes at least one louver, the physical orientation of which is controllably adjustable. The shield is sufficiently spaced from the substrate cathode to be substantially outside an area of sparging and is fixed between the anode and cathode. In an embodiment of the electroplating system, the substrate cathode is movable in horizontal directions toward and away from the anode while the shield is stationary in such horizontal directions.
REFERENCES:
patent: 3880725 (1975-04-01), Van Raalte et al.
patent: 4534832 (1985-08-01), Doiron, Jr.
patent: 4879007 (1989-11-01), Wong
patent: 5401370 (1995-03-01), Kauper et al.
Gorgos Kathryn
Leader William T.
Technic Inc.
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