Shielding assembly for a semiconductor manufacturing...

Details Shielding assembly for a semiconductor manufacturing... Shielding assembly for a semiconductor manufacturing...

2008-05-27

2008-05-27

Kim, Robert (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S515100, C438S514000

Reexamination Certificate

active

07378670

ABSTRACT:
A shielding assembly for use in a semiconductor manufacturing apparatus, such as an ion implantation apparatus, includes one or more removable shielding members configured to cover inner surfaces of a mass analyzing chamber. The shielding assembly reduces process by-products from accumulating on the inner surfaces. In one embodiment, a shielding assembly includes first and second shielding members, each having a unitary construction and configured to cover a magnetic area in the mass analyzing chamber. The shielding members desirably are made entirely of graphite or impregnated graphite to minimize contamination of the semiconductor device being processed caused by metal particles eroded from the inner surfaces of the mass analyzing chamber.

REFERENCES:
patent: 4914292 (1990-04-01), Tamai et al.
patent: 5396076 (1995-03-01), Kimura
patent: 5554854 (1996-09-01), Blake
patent: 5883393 (1999-03-01), Tien et al.
patent: 5947053 (1999-09-01), Burnham et al.
patent: 6239440 (2001-05-01), Abbott
patent: 2003/0079834 (2003-05-01), Good

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