Shielded electret transducer and method of making the same

Details Shielded electret transducer and method of making the same Shielded electret transducer and method of making the same

1989-02-24

1991-02-12

Isen, Forester W.

Electrical audio signal processing systems and devices

Circuitry combined with specific type microphone or loudspeaker

With electrostatic microphone

381191, 307400, H04R 300

Patent

active

049930729

ABSTRACT:
An electret transducer including a pair of spaced electrodes, one electrode being connected to a preamplifier input, an insulator on the outer surface of the electrode connected to the preamplifier input, and a conductive layer on the other side of the insulator, whereby the conductive layer can be used to shield the electrode to reduce stray capacitance between it and other components of the transducer by connecting the conductive shield to the output of the preamplifier circuit for the transducer. Also disclosd is the use of a silicon backplate with an integrated circuit formed therein, an insulator layer thereon, a conductive layer thereon, and an electret layer thereon, the conductive layer being grounded during poling of the electret to protect the integrated circuit from damage.

REFERENCES:
patent: Re28420 (1975-05-01), Murphy
patent: 4149095 (1979-04-01), Poirier et al.
patent: 4621171 (1986-11-01), Wada et al.
patent: 4764690 (1988-08-01), Murphy et al.
Hohn, D. and Gerhar-Multhaupt, R., "Silicon Dioxide Electret Transducer", J. Acoust. Soc. Am., vol. 75, pp. 1297-1298 (Apr. 1984).
Sprenkeis, A. and Bergveld, P., "Development of a Subminiature Electret Microphone Constructed in Silicon", Proc. 4th Conf. Solid State Sensors and Actuators, IEEE, Tokyo, 1987, p. 295.

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