Shielded capacitive mask aligner

Details Shielded capacitive mask aligner Shielded capacitive mask aligner

1983-10-12

1986-08-19

Strecker, Gerard R.

Electricity: measuring and testing

Conductor identification or location

Inaccessible

148DIG102, G01R 2726

Patent

active

046072136

ABSTRACT:
An aligner for aligning a mask and a wafer during photolithography of a semiconductor chip uses detection of the differential capacitance between two sets of conductive fingers on the mask and ridges on the wafer. An A.C. signal is applied to the ridges and the phase or amplitude of the signals coupled to the two sets of fingers is detected and compared. A shield is positioned between the ridges and the fingers to ensure that coupling occurs only between desired portions of the ridges and the fingers.

REFERENCES:
patent: 3938113 (1976-02-01), Dobson et al.

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