Electrical generator or motor structure – Non-dynamoelectric – Thermal or pyromagnetic
Reexamination Certificate
2006-02-20
2010-10-12
Benson, Walter (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Thermal or pyromagnetic
C310S324000
Reexamination Certificate
active
07812502
ABSTRACT:
A micromechanical resonator is formed on a substrate. The resonator has a partial spherical shell clamped on an outside portion of the shell to the substrate. In other embodiments, a flat disc or other shape may be used. Movement is induced in a selected portion of the disc, inducing easily detectible out-of-plane motion. A laser is used in one embodiment to heat the selected portion of the disc and induce the motion. The motion may be detected by capacitive or interferometric techniques.
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Aubin Keith
Craighead Harold G.
Houston Brian H.
Parpia Jeevak M.
Reichenbach Robert B.
Benson Walter
Cornell Research Foundation Inc.
Navel Research Laboratory
Rosenau Derek J
Schwegman Lundberg & Woessner, P.A.
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