Adhesive bonding and miscellaneous chemical manufacture – Surface bonding means and/or assembly means therefor – With testing – measuring – and/or indicating means
Reexamination Certificate
2006-10-25
2010-10-19
Nguyen, Khanh (Department: 1791)
Adhesive bonding and miscellaneous chemical manufacture
Surface bonding means and/or assembly means therefor
With testing, measuring, and/or indicating means
C156S064000
Reexamination Certificate
active
07814954
ABSTRACT:
A sheet sticking apparatus10comprises a sheet feed-out unit12that feeds out an adhesive sheet S to a position facing a surface of a semiconductor wafer W and a press roller14that presses the adhesive sheet S to stick the adhesive sheet S onto the wafer W. The sheet feed-out unit12includes a tension measuring means35for measuring a tension of the adhesive sheet S between the sheet feed-out unit12and the press roller14and a sticking angle maintaining means37provided with a feed-out head49for maintaining a sticking angle θ. After measuring and adjusting the tension immediately before sticking the adhesive sheet S, the feed-out head49is lowered in proportion to the movement amount of the press roller14, thereby the sticking angle θ is maintained, and thus the tension is maintained at a constant level.
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PCT/JP2006/321223 International Search Report and English Translation.
Kobayashi Kenji
Nonaka Hideaki
Blades John
Lintec Corporation
Lowe Hauptman & Ham & Berner, LLP
Nguyen Khanh
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