Sheet sticking apparatus

Details Sheet sticking apparatus Sheet sticking apparatus

2011-03-08

2011-03-08

Nguyen, Khanh (Department: 1746)

Adhesive bonding and miscellaneous chemical manufacture

Surface bonding means and/or assembly means therefor

With cutting, punching, piercing, severing, or tearing

C156S540000

Reexamination Certificate

active

07900677

ABSTRACT:
A sheet sticking apparatus comprises a sheet feed-out unit12including a peel plate22for peeling off an adhesive sheet S from a release liner PS; and a press roller14for pressing the adhesive sheet S onto a wafer W supported by a table13to stick the sheet thereto, wherein the peel plate22is supported movably forward and backward by a cylinder50. The peel plate22is arranged so that the initial position of the front end is adjusted forward/backward corresponding to the size of the wafer W or the size of the table13supporting the same.

REFERENCES:
patent: 7060154 (2006-06-01), Yamamoto et al.
patent: 2003/0088959 (2003-05-01), Tsujimoto
patent: 2006/0219359 (2006-10-01), Miyamoto et al.
patent: 04293253 (1992-10-01), None
patent: 06032522 (1994-02-01), None
patent: 10-112494 (1998-04-01), None
patent: 2004-047976 (2004-02-01), None
patent: 2005-136306 (2005-05-01), None
PCT/JP2006/312686—International Search Report, mailed Sep. 12, 2006.

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