Sheet peeling apparatus and sheet peeling method

Details Sheet peeling apparatus and sheet peeling method Sheet peeling apparatus and sheet peeling method

2005-04-27

2010-12-07

Osele, Mark A (Department: 1791)

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

C156S345420, C156S583200

Reexamination Certificate

active

07846289

ABSTRACT:
A peeling apparatus10includes a peeling table11supporting a wafer W on which a sheet S is stuck and a sheet peeling unit12disposed above the peeling table11, in which sheet S can be peeled off with relative movement of the sheet peeling unit12and the peeling table11. The peeling apparatus10includes a support roll20of peeling tape PT, first and second rolls30, 31bonding the peeling tape PT to the sheet S surface, and a winding roll21of the peeling tape PT. Peeling-off is performed in a state of forming an initial peeling angle a1such that a peeling tape PT is folded in an aperture C formed between the second roll31and the sheet S, and afterwards the sheet S is peeled off at subsequent peeling angle a2corresponding to a diameter of the second roll31.

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International Search Report of PCT/JP2005/007950 date of mailing Aug. 30, 2005.

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