Sheet-like probe, method of producing the probe, and...

Details Sheet-like probe, method of producing the probe, and... Sheet-like probe, method of producing the probe, and...

2005-04-26

2010-06-15

Karlsen, Ernest F (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C029S846000

Reexamination Certificate

active

07737707

ABSTRACT:
A sheet-like probe and a method of producing the probe. In the probe electrode structure bodies do not come out from an insulation film and achieve high durability, and in a burn-in test for a wafer having a large area and for a circuit device having to-be-inspected electrodes with small intervals, positional displacement, caused by temperature variation, between the electrode structure bodies and the to-be-inspected electrode can be reliably prevented for stable connection conditions. The sheet-like probe includes an insulation layer and a contact film provided with electrode structure bodies arranged on the insulation layer to be apart from each other in the surface direction of the insulation layer and penetratingly extend in the thickness direction of the insulation layer. The electrode structure bodies each are composed of a surface electrode section exposed to the front surface of the insulation layer.

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U.S. Appl. No. 12/089,608, filed Apr. 9, 2008, Yamada, et al.

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