Measuring and testing – Fluid pressure gauge – Photoelectric
Patent
1990-05-07
1991-10-01
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
Photoelectric
73147, 25073119, 356358, G01D 528, G01L 708, G01L 900
Patent
active
050522280
ABSTRACT:
A micromachined diaphragm is positioned across a gap from an end of an optic fiber. The optic fiber and the diaphragm are integrally mounted. The end of the optic fiber provides a local reference plane which splits light carried through the fiber toward the diaphragm. The light is split into a transmitted part which is subsequently reflected from the diaphragm, and a locally reflected part which interferes with the subsequently diaphragm reflected part. The interference of the two reflective parts forms an interference light pattern carried back through the fiber to a light detector. The interference pattern provides an indication of diaphragm deflection as a function of applied pressure across the exposed side of the diaphragm. A detection of magnitude and direction of diaphragm deflection is provided by use of a second fiber positioned across the gap from the diaphragm. The second fiber provides an interference pattern in the same manner as the first fiber but with a phase shift. An opening allowing communication between ambient and the gap enables use of the interferometer sensor as a shear stress measuring device.
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Massachusetts Institute of Technology
Woodiel Donald O.
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