Shaping aperture for a charged particle forming system

Details Shaping aperture for a charged particle forming system Shaping aperture for a charged particle forming system

1983-07-18

1984-04-24

Anderson, Bruce C.

Radiant energy

Luminophor irradiation

2505051, A61K 2702

Patent

active

044450400

ABSTRACT:
A shaping aperture used in a charged particle forming system and provided with a slit for shaping the cross section of a charged beam emitted is disclosed in which at least two thin plates each provided with a through-hole for passing the charged particle beam therethrough are piled so as to form a shaping slit of a desired form by the through-holes.

REFERENCES:
patent: 3193408 (1965-07-01), Triller
patent: 3849649 (1974-11-01), Carey
patent: 3980407 (1976-09-01), Hill
patent: 4151422 (1979-04-01), Goto et al.
patent: 4243866 (1981-01-01), Pfeiffer et al.
patent: 4258265 (1981-03-01), Sumi
patent: 4288697 (1981-09-01), Alber

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