Shaped MEMS contact

Details Shaped MEMS contact Shaped MEMS contact

2011-03-15

2011-03-15

Chen, Jack (Department: 2893)

Electricity: circuit makers and breakers

Electrostrictive or electrostatic

C200S237000, C257S414000

Reexamination Certificate

active

07906738

ABSTRACT:
A MEMS switch fabrication process and apparatus inclusive of a bulbous rounded surface movable contact assembly that is integral with the switch movable element and achieving of long contact wear life with low contact electrical resistance. The disclosed process is compatible with semiconductor integrated circuit fabrication materials and procedures and includes an unusual photoresist reflow step in which the bulbous contact shape is quickly defined in three dimensions from more easily achieved integrated circuit mask and etching-defined precursor shapes. A plurality of differing photoresist materials are used in the process. A large part of the contact and contact spring formation used in the invention is accomplished with low temperature processing including electroplating. Alternate processing steps achieving an alloy metal contact structure are included. Use of a subroutine of processing steps to achieve differing but related portions of the electrical contact structure is also included.

REFERENCES:
patent: 7235750 (2007-06-01), Coutu et al.
patent: 2003/0184419 (2003-10-01), Ma

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