Shape prediction simulator, method and program

Details Shape prediction simulator, method and program Shape prediction simulator, method and program

2008-12-02

2011-12-06

Frejd, Russell (Department: 2128)

Data processing: structural design, modeling, simulation, and em

Modeling by mathematical expression

C709S201000

Reexamination Certificate

active

08073661

ABSTRACT:
An overlap amount definition section defines an amount of overlap between divided regions when a shape prediction objective region in a polished surface formed by chemical mechanical polishing is divided into a plurality of regions. A shape prediction computation processing section divides the objective region into the plurality of regions each of which includes a region corresponding to the overlap amount defined by the overlap amount definition section, and performs computation for shape prediction on each divided region by distributed processing. A merging processing section combines the results of shape prediction on the divided regions that are calculated by the shape prediction computation processing section.

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