Shape memory thin micro-actuator, and method for producing...

Details Shape memory thin micro-actuator, and method for producing... Shape memory thin micro-actuator, and method for producing...

2006-01-10

2006-01-10

Nguyen, Hoang (Department: 3748)

Power plants

Motor operated by expansion and/or contraction of a unit of...

Mass is a solid

C060S528000

Reexamination Certificate

active

06983594

ABSTRACT:
A micro-actuator includes a shape memory thin film having one end fixed to a substrate and one remaining part which, at room temperature, is in the martensitic phase and assumes a curly-configuration, whereas at a higher temperature than a threshold value it changes to the austenitic condition, wherein the film is completely stretched upon the substrate.

REFERENCES:
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patent: 5325880 (1994-07-01), Johnson et al.
patent: 5771902 (1998-06-01), Lee et al.
patent: 6343849 (2002-02-01), Yun et al.
patent: 6481821 (2002-11-01), Yun et al.

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