Shape-measuring laser apparatus using anisotropic magnification

Optics: measuring and testing – By polarized light examination – With light attenuation

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25055923, G01B 1124

Patent

active

060468122

ABSTRACT:
The present invention relates to an apparatus for measuring surface relief profile of an object by projecting a line-shaped laser sheet beam in triangulation method and anisotropic magnification optics for improving the measurement resolution. The purpose of the present invention is to provide a system or an apparatus capable of measuring relief profiles with anisotropic magnification optics composed with one or more positive and one or more negative cylindrical lenses, which allows it to obtain magnified images along the direction vertical to the length-wise direction of the image of a line-shaped laser sheet beam for higher resolution in the relief profile measurements along the direction parallel to the length-wise direction of a line-shaped laser sheet beam image to measure the same range of area as the range without anisotropic magnification optics.

REFERENCES:
patent: 4634279 (1987-01-01), Ross et al.
patent: 5129010 (1992-07-01), Higuchi et al.
patent: 5193120 (1993-03-01), Gamache et al.
patent: 5589941 (1996-12-01), Sabater et al.
patent: 5621814 (1997-04-01), Honda

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