Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
Reexamination Certificate
2008-07-11
2010-06-08
Lau, Tung S (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Dimensional determination
Reexamination Certificate
active
07734445
ABSTRACT:
A device measures a measurement object surface shape, and includes a base to which the measurement object is secured; a slide movable in at least three different directions and secured to the base; a probe holding unit mounted to the slide; and a contact probe resiliently supported by the holding unit so as to be movable with respect to the holding unit. Additional features include a unit measuring the position and posture of the probe with respect to the holding unit; a unit calculating a contact-force vector, which the probe receives from the measurement object, from a measurement result of the measuring unit; and a controlling unit moving the probe along the surface of the measurement object. The controlling unit also controls a position of the holding unit so that a magnitude of the contact-force vector comes closer to a control target value thereof in accordance with the magnitude of the contact-force vector.
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Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Lau Tung S
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