Shape measuring device

Details Shape measuring device Shape measuring device

1998-09-08

2000-06-13

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

With light attenuation

382286, 25055922, G01B 1124

Patent

active

060756055

ABSTRACT:
A shape measuring device includes a light source for generating slit light beam and a polygon mirror for scanning the light beam and illuminating an object to be measured. The device further includes space-coding light beam controlling means, phase-shifting light beam controlling means, and a CCD camera which picks up an optical image of an object to be measured obtained by illumination of the light beam. The space-coding light beam controlling means controls light beam whose distribution of integrated illumination has a stripe patter in accordance with a predetermined code and the phase-shifting light beam controlling means controls light beam whose distribution of integrated illumination has a sine-wave like pattern. The distribution of integrated illumination intensity is possessed by the light beam illuminating within a time period for picking up one frame. With the picked up image information, space-coding shape operating means calculates a rough shape of the object to be measured, phase-shifting shape operating means calculates a precise shape of the object be measured, and then shape combining/operating means combines and calculates the shape of the object to be measured. Because the device combines a rough shape measured with wide range and a precise shape measured with high resolving power, the device can measure shape with wide dynamic range and with high resolution power.

REFERENCES:
patent: 4657394 (1987-04-01), Halioua
patent: 5104227 (1992-04-01), Uesugi et al.
patent: 5450204 (1995-09-01), Shigeyama et al.
patent: 5848188 (1998-12-01), Shibata et al.

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