Optics: measuring and testing – With plural diverse test or art
Reexamination Certificate
2007-09-18
2007-09-18
Punnoose, Roy M (Department: 2886)
Optics: measuring and testing
With plural diverse test or art
Reexamination Certificate
active
11130073
ABSTRACT:
A shape measuring method for measuring a shape of a surface of an object. The method includes a first measuring step for measuring the surface of the object by detecting light from the object, and a second measuring step for measuring the surface of the object by relatively scanning a probe and the object. A scanning speed changes on the basis of the result of the first measurement step.
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Ina Hideki
Matsumoto Takahiro
Sentoku Koichi
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Punnoose Roy M
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