Shape measuring apparatus, shape measuring method, and...

Details Shape measuring apparatus, shape measuring method, and... Shape measuring apparatus, shape measuring method, and...

2005-09-27

2005-09-27

Smith, Zandra V. (Department: 2877)

Optics: measuring and testing

Plural test

C356S601000, C250S309000

Reexamination Certificate

active

06950179

ABSTRACT:
A shape measuring method for measuring a shape of a surface of an object. The method includes a first measuring step for measuring the surface of the object by detecting light from the object, and a second measuring step for measuring the surface of the object by relatively scanning a probe and the object. A scanning speed changes on the basis of the result of the first measurement step.

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