Shape measuring apparatus and shape measuring method

Geometrical instruments – Gauge – Having a movable contact probe

Reexamination Certificate

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Details

C033S559000

Reexamination Certificate

active

08006402

ABSTRACT:
A moving vector calculation unit calculates a moving vector M representing a quantity and a direction of movement of a probe on basis of a stylus displacement vector, a stylus displacement vector D, and a direction change angle θ of the stylus displacement vector D that is caused by a frictional force between a stylus32and the measuring surface5aduring scanning of the measuring surface5aby the stylus32. The stylus displacement vector D is a vector including a quantity and a direction of position displacement of the stylus32relative to the probe5. Movement of an XY-stage7is controlled so that the probe6moves in accordance with the moving vector M.

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Chinese Office Action issued May 11, 2010 (with English translation) in a Chinese application that is a foreign counterpart to the present application.

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