Shape measuring apparatus and method

Details Shape measuring apparatus and method Shape measuring apparatus and method

1997-12-10

2000-02-22

Fulton, Christopher W.

Geometrical instruments

Gauge

Coordinate movable probe or machine

33549, 33554, G01B 1124

Patent

active

060265833

ABSTRACT:
A shape measuring apparatus includes an object measuring device, a holding base, a reference plane measuring device, and a length measuring unit. The holding base holds an object-to-be-measured on its surface and has a reference plane provided on its back side so that a measured surface of the object and the reference plane can be simultaneously scanned by the object measuring device and the reference plane measuring device, respectively. Therefore, the object and the reference plane can sway integrally with each other, and the accuracy of measurement of the measured surface is not influenced by any moving straightness deviation of the holding base unless any change occurs in relative positions of the reference plane and the measured surface. Therefore, the shape of the measured surface can be measured with the flatness accuracy of the reference plane.

REFERENCES:
patent: 3392452 (1968-07-01), Haun
patent: 3600811 (1971-08-01), Weyrauch
patent: 4080741 (1978-03-01), Siddall et al.
patent: 4255862 (1981-03-01), Nakamura
patent: 4611156 (1986-09-01), Feichtinger
Applied Optics, vol. 26, No. 9, issued May 1, 1987 to K. Yoshizumi and entitled "Ultrahigh Accuracy 3-D Profilometer".

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