Shape measuring apparatus

Details Shape measuring apparatus Shape measuring apparatus

2011-03-15

2011-03-15

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C073S105000

Reexamination Certificate

active

07907288

ABSTRACT:
A shape measuring apparatus includes a probe for scanning across a surface to be measured, while vibrating up and down; a minute-vibration generation section for vibrating the probe up and down; a vertical movement control section for moving the probe up and down to keep a constant contact force or a constant distance between the surface to be measured and the probe; a scanning section for scanning the surface to be measured with the probe; a displacement sensor for measuring the vertical displacement of the probe and outputting a probe displacement signal; and a signal processing section for obtaining information about the contact force or the distance between the surface to be measured and the probe from a high-frequency component of the probe displacement signal, and for obtaining information about profile of the surface to be measured from a low-frequency component of the signal obtained when the surface to be measured is scanned such that the distance or the contact force is kept constant.

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