Shape measuring apparatus

Details Shape measuring apparatus Shape measuring apparatus

1987-04-17

1989-05-30

Rosenberger, Richard A.

Optics: measuring and testing

Contour plotting

353 25, 356376, G01B 1124, G01C 1102

Patent

active

048345300

ABSTRACT:
A shape measuring apparatus is disclosed. It comprises a pattern portion having a pattern in which pattern elements are arranged in the pitch width direction according to a predetermined rule so that a plurality of N codes can be distinguished with respect to one another; a projecting portion having a moving portion for moving the pattern in the pitch width direction according to a rule and projection optical system for projecting the pattern onto an object to be measured; a detecting portion for detecting a first detection data and a second detection data by measuring a surface information of the object to be measured on which the pattern is projected from two different directions every time the pattern is moved by the moving portion; an extracting portion for extracting a first position data and a second position data corresponding to a point position of the object to be measured from the first and second detection data respectively; and a calculating portion for calculating a coordinate of the point position corresponding to the first position data of the object to be measured from the first position data and the second position data.

REFERENCES:
patent: 3866052 (1975-02-01), DiMatteo et al.
patent: 4185918 (1980-01-01), DiMatteo et al.
patent: 4259589 (1981-03-01), DiMatteo et al.
patent: 4634278 (1987-01-01), Ross et al.

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