Shallow trench isolation using low dielectric constant insulator

Details Shallow trench isolation using low dielectric constant insulator Shallow trench isolation using low dielectric constant insulator

1995-10-24

1997-12-30

Dang, Trung

Fishing, trapping, and vermin destroying

437240, 437238, 148DIG50, H01L 2176

Patent

active

057029768

ABSTRACT:
A shallow trench isolation is disclosed wherein the trench depth is reduced beyond that achieved in prior art processes. The reduced wench depth helps to eliminate the formation of voids during the trench refill process and provides for greater planarity in the final isolation structure. Effective device isolation is achieved with a reduced trench depth by utilizing refilling dielectric materials having low dielectric constant.

REFERENCES:
patent: 4502914 (1985-03-01), Trumpp et al.
patent: 4824797 (1989-04-01), Goth
patent: 5429995 (1995-07-01), Nishiyama et al.
patent: 5492736 (1996-02-01), Laxman et al.
patent: 5530293 (1996-06-01), Cohen et al.

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