Shaft sealing assembly for vacuum processing apparatus

Seal for a joint or juncture – Seal between relatively movable parts – Circumferential contact seal for other than piston

Reexamination Certificate

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Details

C277S551000, C277S555000, C277S913000

Reexamination Certificate

active

07090222

ABSTRACT:
Herein disclosed is a shaft sealing apparatus which comprises a vacuum casing formed with a vacuum chamber, a driving shaft having an outer cylindrical surface and movably extending in the vacuum chamber of the vacuum casing, and a sealing ring in the form of an annular ring shape and including a sealing lip held in contact with the outer cylindrical surface of the driving shaft, an annular spring member operative to impart a force to the sealing lip to ensure that the sealing lip is held in tight contact with the outer cylindrical surface of the driving shaft, and a peripheral portion radially outwardly extending from the sealing lip, in which the outer cylindrical surface of the driving shaft is smaller in surface roughness Ra than 0.1 (μm).

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