Shadow moire using non-zero talbot distance

Optics: measuring and testing – Shape or surface configuration – Triangulation

Reexamination Certificate

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C356S618000, C250S23700G

Reexamination Certificate

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11252789

ABSTRACT:
A method for measuring deformation in specimens is provided. The method includes providing a shadow moiré system, the shadow moiré system including an illumination source, a reference grating and an image capture device and providing a specimen. The method further includes determining a selected distance between the specimen and the reference grating, and illuminating the specimen with light from the illumination source directed through the reference grating onto the specimen, thereby forming shadow moiré fringes onto the specimen. The method further includes capturing an image of the shadow moiré fringes by the image capture device.

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Martin et al., “Measurement of Thermally Induced Warpage in Printed Wiring Boards”, AMD-Vo. 13/EEP-vol. 1, (Manufacturing processes and Materials Challenges in Microelectronic Packaging (ASME 1991), pp. 43-47.

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