Shadow mask plate material and shadow mask

Details Shadow mask plate material and shadow mask Shadow mask plate material and shadow mask

1994-02-09

1996-07-02

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

430 23, 430 36, 430323, G03F 900

Patent

active

055320880

ABSTRACT:
Disclosed is a shadow mask plate material which consists of an Fe-Ni-based alloy containing iron and nickel as main constituents, has an unrecrystallized texture with a grain size of 10 .mu.m or less, and is excellent in etching characteristics for forming electron beam apertures.

REFERENCES:
patent: 5308723 (1994-05-01), Inoue et al.

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