Shadow mask deposition of materials using reconfigurable...

Details Shadow mask deposition of materials using reconfigurable... Shadow mask deposition of materials using reconfigurable...

2009-12-23

2011-10-04

Zarneke, David (Department: 2891)

Active solid-state devices (e.g., transistors, solid-state diode

Miscellaneous

C118S719000, C118S720000, C118S721000, C257SE23001

Reexamination Certificate

active

08030785

ABSTRACT:
A shadow mask deposition system includes a plurality of identical shadow masks arranged in a number of stacks to form a like number of compound shadow masks, each of which is disposed in a deposition vacuum vessel along with a material deposition source. Materials from the material deposition sources are deposited on the substrate via openings in corresponding compound shadow masks, each opening being formed by the whole or partial alignment of apertures in the shadow masks forming the compound shadow mask, to form an array of electronic elements on the substrate.

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