Servo guided stage system

Details Servo guided stage system Servo guided stage system

1990-04-30

1992-08-18

Ip, Paul

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

3185682, 31856821, 74479, B66C 2316, B23P 1900

Patent

active

051402424

ABSTRACT:
A positioning stage has a base which carries a stage plate slidably on its upper surface. Three rotatable drives engage both the stage plate and the base to move the stage plate on the base to provide motion along the x and y axes plus rotation. The linear drives each include a motor and a capstan driven by the motor and a drivebar frictionally coupled to the capstan. The stage is spring loaded to provide constant down-load force, regardless of the varying extension length of the drivebar. A ball joint permits varying between the cones and the ball of the ball joint dynamically to desired levels. Measurement of position is provided by integrated, parallel dual axis plane mirror interferometers.

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