Servo-controlled pendular micro-sensor

Details Servo-controlled pendular micro-sensor Servo-controlled pendular micro-sensor

1993-04-06

1995-08-15

Chilcot, Jr., Richard E.

Measuring and testing

Dynamometers

Responsive to force

7351418, G01L 100

Patent

active

054409390

ABSTRACT:
An electrostatically servo-controlled pendular micro-sensor includes a pendular element disposed so as to respond to a force representative of a physical quantity to be measured. To avoid the drifts affecting the stability of the micro-sensor, generated by the existence of unstable parasitic voltages that impair the voltages provided by a system servo-controlling the pendular element, the electrostatic forces generated to draw back the pendular element through servo-control voltages have a zero mean value. The control voltages are periodic voltages or series of electric signals of equal durations, each having, preferably, a zero mean value.

REFERENCES:
patent: 3470747 (1969-10-01), Rasmussen
patent: 3877313 (1975-04-01), Ferriss
patent: 3911738 (1975-10-01), Fischer
patent: 4131020 (1978-12-01), Hugli et al.
patent: 4319488 (1992-03-01), Hobbs et al.
patent: 4584885 (1986-04-01), Cadwell
patent: 5095750 (1992-03-01), Suzuki et al.
patent: 5331852 (1994-07-01), Grieff et al.
patent: 5343766 (1994-09-01), Lee
M. Paemel, "Interface Circuit for Capacitive Accelerometer", Sensors and Actuators, vol. 17, No. 3 & 4, May 1989, pp. 629-637.

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