Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2011-07-05
2011-07-05
Masinick, Michael D (Department: 2128)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S028000, C700S108000, C700S109000, C700S110000
Reexamination Certificate
active
07974729
ABSTRACT:
A server device is provided with a measurement information storage unit1201which can store plural measurement information, i.e., information having a measurement value and time information indicating time; an instruction receiving unit for receiving an output instruction of the measurement information; a measurement information acquisition unit for acquiring, from the measurement information storage unit, the measurement information designated by the output instruction; an output information composing unit for composing output information by using the acquired measurement information; and an output unit for outputting the output information composed by the output information composing unit. The output instruction includes an instruction for designating one or more desired number of times of execution of a sub-recipe among plural number of times of execution of the sub-recipe in the recipe and the measurement information acquisition unit acquires measurement information corresponding to the sub-recipe designated by the output instruction.
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Koyama Noriaki
Obata Minoru
Takahashi Masashi
Masinick Michael D
Pearne & Gordon LLP
Tokyo Electron Limited
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