Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2006-12-20
2009-06-09
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S197000, C333S200000, C310S309000, C310S370000, C331S154000, C331S156000
Reexamination Certificate
active
07545238
ABSTRACT:
One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC signal is applied to the drive electrode. Such a configuration permits higher amplitude signals to be applied to the drive electrode without the performance of the actuator being compromised by nonlinear effects. In addition, the serrated tooth configuration enables a sufficiently high actuating force to be maintained even though the distance traversed by the MEMS resonator arm during operation is quite small. Further, the serrated configuration allows a MEMS resonator system to withstand larger fluctuations in voltage and larger substrate stresses without experiencing a substantial shift in resonant frequency.
REFERENCES:
patent: 6831531 (2004-12-01), Giousouf et al.
patent: 7360423 (2008-04-01), Ayazi et al.
patent: 2004/0135466 (2004-07-01), Higuchi
patent: 2005/0046518 (2005-03-01), Zurcher et al.
patent: 2005/0151442 (2005-07-01), Kihara et al.
Ye et al., “Optimal Shape Design of an Electrostatic Comb Drive in Microelectromechanical Systems”, Journal of Microelectromechanical Systems, vol. 7, No. 1, Mar. 1988, pp. 16-26.
Rosa et al., “Enhanced Electrostatic Force Generation Capability of Angled Comb Finger Design Used in Electrostatic Comb-Drive Actuators”, Electronics Letters, vol. 34, No. 18, Sep. 1998, pp. 1787-1788.
International Search Report, Nov. 7, 2008.
Hagelin Paul Merritt
Pedersen David Raymond
Patterson & Sheridan LLP
SiTime Inc.
Summons Barbara
LandOfFree
Serrated MEMS resonators does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Serrated MEMS resonators, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Serrated MEMS resonators will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4145044