Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2006-12-20
2009-06-09
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S197000, C333S200000, C310S309000, C310S370000, C331S154000, C331S156000
Reexamination Certificate
active
07545239
ABSTRACT:
One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC signal is applied to the drive electrode. Such a configuration permits higher amplitude signals to be applied to the drive electrode without the performance of the actuator being compromised by nonlinear effects. In addition, the serrated tooth configuration enables a sufficiently high actuating force to be maintained even though the distance traversed by the MEMS resonator arm during operation is quite small. Further, the serrated configuration allows a MEMS resonator system to withstand larger fluctuations in voltage and larger substrate stresses without experiencing a substantial shift in resonant frequency.
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International Search Report. Nov. 7, 2008.
Hagelin Paul Merritt
Pedersen David Raymond
Patterson & Sheridan LLP
SiTime Inc.
Summons Barbara
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