Serrated MEMS resonators

Wave transmission lines and networks – Coupling networks – Electromechanical filter

Reexamination Certificate

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Details

C333S197000, C333S200000, C310S309000, C310S370000, C331S154000, C331S156000

Reexamination Certificate

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07545239

ABSTRACT:
One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC signal is applied to the drive electrode. Such a configuration permits higher amplitude signals to be applied to the drive electrode without the performance of the actuator being compromised by nonlinear effects. In addition, the serrated tooth configuration enables a sufficiently high actuating force to be maintained even though the distance traversed by the MEMS resonator arm during operation is quite small. Further, the serrated configuration allows a MEMS resonator system to withstand larger fluctuations in voltage and larger substrate stresses without experiencing a substantial shift in resonant frequency.

REFERENCES:
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patent: 7360423 (2008-04-01), Ayazi et al.
patent: 2004/0135466 (2004-07-01), Higuchi
patent: 2005/0046518 (2005-03-01), Zurcher et al.
patent: 2005/0151442 (2005-07-01), Kihara et al.
Ye et al., “Optimal Shape Design of an Electrostatic Comb Drive in Microelectromechanical Systems”, Journal of Microelectromechanical Systems, vol. 7, No. 1, Mar. 1988, pp. 16-26.
Rosa et al., “Enhanced Electrostatic Force Generation Capability of Angled Comb Finger Design Used in Electrostatic Comb-Drive Actuators”, Electronics Letters, vol. 34, No. 18, Sep. 1998, pp. 1787-1788.
International Search Report. Nov. 7, 2008.

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