Serrated Fourier filters and inspection systems

Details Serrated Fourier filters and inspection systems Serrated Fourier filters and inspection systems

2008-07-08

2008-07-08

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237400, C359S559000

Reexamination Certificate

active

11145873

ABSTRACT:
Serrated Fourier filters and inspection systems are provided. One Fourier filter includes one or more blocking elements configured to block a portion of light from a wafer. The Fourier filter also includes periodic serrations formed on edges of the one or more blocking elements. The periodic serrations define a transition region of the one or more blocking elements. The periodic serrations are configured to vary transmission across the transition region such that variations in the transmission across the transition region are substantially smooth. One inspection system includes a Fourier filter configured as described above and a detector that is configured to detect light transmitted by the Fourier filter. Signals generated by the detector can be used to detect the defects on the wafer.

REFERENCES:
patent: 3597069 (1971-08-01), Heinonen, Jr.
patent: 6717661 (2004-04-01), Bernstein et al.
patent: 6940609 (2005-09-01), Scheiner
patent: 7184138 (2007-02-01), Li

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