Series ferroelectric capacitor structure for monolithic integrat

Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor

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29 2542, 257295, H01G 101, H01L 300, H01L 2702

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active

052067882

ABSTRACT:
A ferroelectric capacitor for a memory device including a substrate, a bottom electrode and a top electrode. Between the bottom and top electrodes is either an alternating plurality of layers of ferroelectric material and intermediate electrodes or a plurality of layers of ferroelectric material. A method for forming the same through establishing one layer over the other is also disclosed.

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patent: 4267634 (1981-05-01), Wellard
patent: 4437139 (1984-03-01), Howard
patent: 4914546 (1990-04-01), Alter
patent: 5005102 (1991-04-01), Larson
patent: 5046043 (1991-09-01), Miller et al.

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