Electric resistance heating devices – Heating devices – Vaporizer
Patent
1990-08-29
1991-11-26
Walberg, Teresa J.
Electric resistance heating devices
Heating devices
Vaporizer
118726, C23C 1400
Patent
active
050689150
ABSTRACT:
A series evaporator for vacuum vapor-deposition apparatus has several evaporators 5 with individual power control, heated by passing through a current, supported on column-like, electrical supply lines 3, 4 wherein the column-like supply lines 3, 4 are held by an electrically conductive support body 6 extending over the entire length of the series evaporator. The supply lines 3 of the one polarity are connected to the support body 6 in an electrically conductive manner whereas the supply lines 4 of the other polarity are passed through the support body 6 in an insulated manner and connected to conducting wires 7 disposed in an insulated manner. Spring elements 8 apply pressure to the supply lines 4 traversing the support body 6 with play a, b, the action of these spring elements being exerted approximately parallel to the longitudinal extension of the evaporator and pressing the top portions 9 of the supply lines 4 against the front surfaces 10 of the evaporator 5 which they face. The spring elements themselves are held and guided in an insulating manner with respect to the support bodies 6 or are made of an insulating material, and the conducting wires 7 connected to these supply lines 4 are conductors passed through by a coolant or are configured as cooling tubes 11 or cooling pipes running parallel to the conducting wires and discharging into chambers or channels 12 provided in the supply lines 4.
REFERENCES:
patent: 2554902 (1951-05-01), Godley
patent: 2969448 (1961-01-01), Alexander
patent: 2996418 (1961-08-01), Bleil
patent: 3117887 (1964-01-01), Shepard
patent: 3231846 (1966-01-01), Radke
patent: 3372671 (1968-03-01), Chu
patent: 3387116 (1968-06-01), Dupuis
patent: 4632059 (1986-12-01), Flatscher
Heinz Jochen
Kessler Hans
Krug Thomas
Ruebsam Klemens
Leybold Aktiengesellschaft
Walberg Teresa J.
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