Series evaporator for vacuum vapor-deposition apparatus

Details Series evaporator for vacuum vapor-deposition apparatus Series evaporator for vacuum vapor-deposition apparatus

1991-08-29

1993-01-12

Walberg, Teresa J.

Electric resistance heating devices

Heating devices

Vaporizer

118726, C23C 1426

Patent

active

051796228

ABSTRACT:
A series evaporator for vacuum vapor-deposition apparatus has several evaporators 5 with individual power control, heated by passing through a current, supported on column-like, electrical supply lines 3, 4 wherein the column-like supply lines 3, 4 are held by an electrically conductive support body 6 extending over the entire length of the series evaporator, and the supply lines 3 of the one polarity are connected to the support body 6 in an electrically conductive manner whereas the supply lines 4 of the other polarity pass through the support body 6 in an insulated manner and connected to conducting wires 7 disposed in an insulated manner.

REFERENCES:
patent: 2554902 (1951-05-01), Godley
patent: 2969448 (1961-01-01), Alexander
patent: 3117887 (1964-01-01), Shepard
patent: 3281517 (1966-10-01), Hemmer
patent: 3544763 (1970-12-01), Geir
patent: 3554512 (1971-01-01), Elliott
patent: 3563202 (1971-02-01), Mackrael
patent: 3617348 (1971-11-01), Kelley
patent: 3637980 (1972-01-01), Fox
patent: 4264803 (1981-04-01), Shinko
patent: 4537506 (1985-08-01), Lersmacher
patent: 4632059 (1986-12-01), Flatscher

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