Electric resistance heating devices – Heating devices – Vaporizer
Patent
1992-02-04
1993-08-24
Walberg, Teresa J.
Electric resistance heating devices
Heating devices
Vaporizer
118726, C23C 1426
Patent
active
052396118
ABSTRACT:
A device for heating a material to an evaporation temperature so that the material can be coated on a substrate is provided which includes a series evaporator for containing the material to be coated. There is also provided a plurality of radiant heaters disposed above the evaporator and the material to be evaporated, the heaters each being essentially flat and disposed parallel and adjacent to the upper surface of the material. Heat shields are also disposed above the radiant heaters and below a substrate to be coated and have an area sufficient to prevent direct radiant heat contact with the substrate to be coated. A plurality of vapor outlet openings are formed between each adjacent heat shield of the series evaporator and face the substrate to be coated. The outlets are in vapor communication with the material being evaporated. Each of the radiant heaters are located beneath an upper heat shield and within the area protected by the heat shields.
REFERENCES:
patent: 2447789 (1948-08-01), Barr
patent: 2998376 (1961-08-01), Smith
patent: 3260235 (1966-07-01), Witz
patent: 3647197 (1972-03-01), Halloway
patent: 4094269 (1978-06-01), Malinovski
patent: 4401052 (1983-08-01), Baron
patent: 4748313 (1988-05-01), de Rudnay
Da Silva, E. M., Evaporation Method & Apparatus, I.B.M. Tech. Disc. Bull., vol. 4, No. 4, Sep. 1961.
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