Electric heating – Metal heating – By arc
Reexamination Certificate
2006-09-11
2009-08-04
Paik, Sang Y (Department: 3742)
Electric heating
Metal heating
By arc
C438S486000
Reexamination Certificate
active
07569793
ABSTRACT:
A sequential lateral solidification (SLS) device and a method of crystallizing silicon using the same is disclosed, wherein alignment keys are formed on a substrate with one mask having a plurality of different patterns, and a crystallization process is progressed in parallel to an imaginary line connecting the alignment keys with information for a distance between the mask and the alignment key. The SLS device includes a laser beam generator for irradiating laser beams; a mask having a plurality of areas; a mask stage for moving the mask loaded thereto, to transmit a laser beam through a selective area of the mask; and a substrate stage for moving a substrate loaded thereto, to change portions of the substrate irradiated with the laser beam passing through the mask.
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Jung Yun Ho
Kim Young Joo
Birch & Stewart Kolasch & Birch, LLP
LG Display Co. Ltd.
Paik Sang Y
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