Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-06-06
2006-06-06
Lee, Hwa (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07057739
ABSTRACT:
An interferometric apparatus includes: a polarizing beam-splitting interface positioned to separate an input beam into two orthogonally polarized beams; and interferometer optics positioned to receive a first set of beams derived from one of the orthogonally polarized beams and a second set of beams derived from the other of the orthogonally polarized beams. The interferometer optics are configured to direct each beam in the first set to contact different locations of a measurement object at least once, and subsequently combine each beam in the first set with a corresponding beam from the second set of beams to produce a corresponding output beam comprising information about changes in the position of the measurement object with respect to a different degree of freedom.
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Fish & Richardson P.C.
Lee Hwa
Lyons Michael A.
Zygo Corporation
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