Separable drive coupling using metal bellows

Details Separable drive coupling using metal bellows Separable drive coupling using metal bellows

1987-08-31

1989-11-21

Hall, Carl E.

Rotary shafts, gudgeons, housings, and flexible couplings for ro

Torque transmitted via flexible element

Element includes diverging wall portions defining annular...

295691, 464 38, 464157, 901 25, 901 28, F16D 352

Patent

active

048819220

ABSTRACT:
In semiconductor vacuum processing, it is desirable to minimize the material handling mechanisms that must be located in the evacuated process chamber. To accomplish this, a mechanism has been designed that locates the necessary power elements such as motors (12-16) outside the chamber (32). Power is transmitted to the mechanism via commercially available rotary vacuum feed-through devices (30) mounted in the chamber walls (28) and the separable, zero backlash couplings (44) located within the chamber. These couplings (44) allow easy removal and replacement of the handling mechanism without the need for physical access and tools.

REFERENCES:
patent: 3232076 (1966-02-01), Sundt

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