Sensors

Details Sensors Sensors

1988-01-21

1989-05-16

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

73777, 310321, 310323, 310324, H01L 4108

Patent

active

048313041

ABSTRACT:
A solid sensor, for sensing a physical parameter such as pressure, comprises a resonantly vibratable beam formed across a cavity in a substrate by micro-machining, and arranged such that changes in the parameter vary its resonant frequency. The beam either consists of or has deposited on it a material exhibiting piezo-electric effect, so that vibration of the beam can be excited by using the effect. This is achieved using light, either by forming a photodiode in the substrate in or near the beam, so that illuminating the photodiode causes a voltage to be applied to the beam, or, in the case where the piezo-electric material exhibits surface piezo-electric effect, by directly illuminating the beam.

REFERENCES:
patent: 3145354 (1964-08-01), Hutson
patent: 3183359 (1965-05-01), White
patent: 3185942 (1965-05-01), White
patent: 3234488 (1966-02-01), Fair
patent: 3513309 (1970-05-01), Hehemann
patent: 3714604 (1973-01-01), Kaliski
patent: 4524294 (1985-06-01), Brody

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