Sensor with silicon strain gage

Details Sensor with silicon strain gage Sensor with silicon strain gage

1998-02-17

1999-08-03

Felber, Joseph L.

Measuring and testing

Fluid pressure gauge

Diaphragm

73726, G01L 904, G01L 906

Patent

active

059328096

ABSTRACT:
A media-compatible sensing structure (210) that employs strain-sensing elements (222) formed in or on a silicon chip (212). The sensor (210) generally includes a metal body (214) having a diaphragm (216) and an edge (226) formed by an abrupt change in the thickness of the metal body (214) in a direction normal to the diaphragm (216). The silicon chip (212) is secured directly to the metal diaphragm (216) and has at least one strain-sensing element (222) aligned with the edge (226) of the body (214) in the direction normal to the diaphragm (216), such that movement of the diaphragm (216) induces strain in the silicon chip (212) that is localized at the strain-sensing element (222). The chip (212) preferably includes a groove (234) in its surface (212) facing the diaphragm (216) and between the strain-sensing element (222) and the metal body (214), such that strain induced in the chip (212) by movement of the diaphragm (216) is further concentrated in the region of the chip (212) containing the strain-sensing element (222). The chip (212) is preferably attached to the metal diaphragm (216) with a bonding material (236). To promote adhesion of the chip (212) to the diaphragm (216), the chip (212) preferably has recesses (240) in its surface facing the diaphragm (216) to create an interlocking effect between the bonding material (236) and the chip (212).

REFERENCES:
patent: 3341794 (1967-09-01), Stedman
patent: 5629486 (1997-05-01), Viduya et al.

Affiliated with

Also associated with

Rating

Sensor with silicon strain gage does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Sensor with silicon strain gage, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Sensor with silicon strain gage will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-851183