Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1998-10-14
2000-01-18
Noori, Max
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
73862451, 73763, G01P 1508
Patent
active
RE0364983
ABSTRACT:
A micromachined force sensor containing separate sensing and actuator structures. A member is suspended above the substrate so that it is movable along an axis in response to a force. The member includes a set of parallel sense fingers and a separate set of parallel force fingers. The sense fingers are positioned between fingers of two sense plates, to form a first differential capacitor, whose capacitance changes when the member moves in response to a force along the axis. The change in capacitance induces a sense signal on the member, which permits the measurement of the magnitude and duration of the force. The force fingers are positioned between fingers of two actuator plates, to form a second differential capacitor. The sense signal can be used to provide feedback to the second differential capacitor to generate different electrostatic forces between the force fingers and the two actuator plates, to offset the force applied along the preferred axis. Limit stops limit the movement of the member to less than the distance between the electrodes of the differential capacitors, to prevent contact between the electrodes. Additional fingers be positioned around the differential capacitors to minimize parasitic capacitances.
REFERENCES:
patent: 4584885 (1986-04-01), Cadwell
patent: 4663972 (1987-05-01), Gerard
patent: 4711128 (1987-12-01), Boura
patent: 4896098 (1990-01-01), Haritonidis et al.
patent: 5015850 (1991-05-01), Zdeblick et al.
patent: 5025346 (1991-06-01), Tang et al.
patent: 5083466 (1992-01-01), Holm-Kennedy et al.
patent: 5181156 (1993-01-01), Gutteridge et al.
patent: 5189914 (1993-03-01), White
patent: 5331853 (1994-07-01), Hulsing, II
patent: 5345824 (1994-09-01), Sherman et al.
patent: 5417312 (1995-05-01), Tsuchitani
patent: 5447068 (1995-09-01), Tang
patent: 5565625 (1996-10-01), Young
patent: 5880369 (1999-03-01), Samuels et al.
patent: 5880921 (1999-03-01), Tham et al.
W. Henroin et al., Wide Dynamic Range DirectDigital Accelerometer, 1990.
F. Rudolf et al., Silicon Microaccelerometer (no date).
Bart Stephen
Howe Roger T.
Analog Devices
Noori Max
LandOfFree
Sensor with separate actuator and sense fingers does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Sensor with separate actuator and sense fingers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Sensor with separate actuator and sense fingers will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-556441