Sensor with improved capacitive to voltage converter integrated

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system

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G01L 912

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active

060587830

ABSTRACT:
A capacitive transducer (10) which provides an output voltage in response to the application of a mechanical stimulus such as pressure or acceleration includes a signal conditioning integrated circuit (12) to which are connected a variable capacitor (C.sub.VAR), a reference capacitor (C.sub.REF), a linear correction capacitor (C.sub.LIN) as well as an integrating capacitor (C.sub.INT) and associated filtering components. The linear correction capacitor (C.sub.LIN) is used to offset a fixed parasitic charge associated with the variable capacitor. Any net error charge appearing on a detect, common node (pin 4) between the variable capacitor and the reference capacitor is cancelled out by means of an analog feedback network (22). In a modified embodiment a thermal compensation network (40) allows for correction for thermal error at a second temperature without having any affect at a first temperature.

REFERENCES:
patent: 4227419 (1980-10-01), Park
patent: 4398426 (1983-08-01), Park et al.
patent: 4982351 (1991-01-01), Kawate et al.
patent: 5241850 (1993-09-01), Kawate
patent: 5445031 (1995-08-01), Benzel
patent: 5534773 (1996-07-01), Tsugai et al.
patent: 5637798 (1997-06-01), Schatz
patent: 5909132 (1999-06-01), Trofimenkoff et al.
Publication: An Integrated Circuit for Capacitive Pressure Transducers; Mohammed Faheem Akram (Apr. 7-9, 1981).

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