Sensor with cantilever and optical resonator

Details Sensor with cantilever and optical resonator Sensor with cantilever and optical resonator

2008-01-15

2008-01-15

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

10524506

ABSTRACT:
An optical sensor, in particular for a scanning force microscope, measures the deflection of a cantilever (3) using an optical resonator between the cantilever (3) and an output surface (12b) of a lens assembly (10). In order to form the resonator, output surface (12b) is concave and parallel to the wavefronts of the light within the resonator. This design provides a resonator of high stability and allows to keep the distance between lens assembly (10) and cantilever (3) comparatively large.

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Rugar, D.; Mamin, H. J.; Erlandsson, R.; Stern, J. E.; Terris, B. D., Force microscope using a fiber-optic displacement sensor, Review of Scientific Instruments, vol. 59, Issue 11, pp. 2337-2340 (Nov. 1988).

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