Sensor using piezoelectric elements

Measuring and testing – Dynamometers – Responsive to multiple loads or load components

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73862042, 73862632, 73DIG4, G01L 300

Patent

active

057807493

ABSTRACT:
The periphery of a disk having flexibility is fixed to a sensor casing, and a force applied to the central portion is detected. A doughnut disk-shaped piezoelectric element is positioned on the upper surface of the disk, and upper electrode layers indicated by patterns of D1 to D6 are formed on the upper surface of the piezoelectric element. Further, lower electrode layers similarly having pattern of D1 to D6 are formed on the lower surface of the piezoelectric element, and the lower surface of the lower electrode layer is fixed on the upper surface of the disk. Six detection elements D1 to D6 are formed each of which is constituted by a pair of upper and lower electrode layers and a portion of piezoelectric element put therebetween. Thus, force components exerted at an origin defined in the central portion of the disk in respective axes directions of X, Y, Z can be detected based on charges produced in detection elements D1, D2, detection elements D3, D4, and detection elements D5, D6, respectively.

REFERENCES:
patent: 4905523 (1990-03-01), Okada
patent: 4967605 (1990-11-01), Okada
patent: 4969366 (1990-11-01), Okada
patent: 5014415 (1991-05-01), Okada
patent: 5035148 (1991-07-01), Okada
patent: 5092645 (1992-03-01), Okada
patent: 5182515 (1993-01-01), Okada

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