Sensor unit, exposure apparatus, and device manufacturing...

Details Sensor unit, exposure apparatus, and device manufacturing... Sensor unit, exposure apparatus, and device manufacturing...

2008-04-01

2008-04-01

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S071000

Reexamination Certificate

active

07352441

ABSTRACT:
A sensor unit includes a substrate that has a first mark, and a second mark used to specify a position of the first mark, a sensor for detecting light that has transmitted through the first mark and the substrate, and a light shielding portion, provided between the second mark and the sensor, for shielding the light from the second mark against the sensor.

REFERENCES:
patent: 6151102 (2000-11-01), Nishi
patent: 7193685 (2007-03-01), Miura
patent: 2005/0128453 (2005-06-01), Miura
patent: 2005/0146693 (2005-07-01), Ohsaki
patent: 2006/0044538 (2006-03-01), Amemiya et al.
patent: 2005-166722 (2005-06-01), None
patent: 2005-175034 (2005-06-01), None
patent: 2005-175400 (2005-06-01), None

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