Sensor systems

Details Sensor systems Sensor systems

1991-12-11

1993-03-23

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Vibration type

73704, 73705, 73DIG1, 25023119, G01L 708, G01L 908, G01L 1100

Patent

active

051953749

ABSTRACT:
In pressure sensor systems based upon a micromachined silicon pressure sensor comprising a resonantly vibratable beam supported on a diaphragm, the beam is excited into resonant vibration by directing an optical excitation signal at the beam resonant frequency, via an optical fibre 26, onto a part of the sensor other than the beam, preferably the diaphragm. To detect the vibrations, the underside of the beam 16 and the adjacent upper surface of the diaphragm 18 are together arranged to define a Fabry-Perot cavity, and a continuous optical detection signal is directed at this cavity, also via the optical fibre 26. The optical detection signal is thus modulated at the vibration frequency of the beam 16 by the cavity, and the modulated signal is reflected back into the optical fibre 26.

REFERENCES:
patent: 4988885 (1991-01-01), Lindstrom
patent: 5105665 (1992-04-01), Parsons et al.
patent: 5124653 (1992-06-01), Andresen et al.
patent: 5152173 (1992-10-01), Willson

Affiliated with

Also associated with

Rating

Sensor systems does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Sensor systems, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Sensor systems will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1344192